Beilstein J. Nanotechnol.2022,13, 1240–1255, doi:10.3762/bjnano.13.103
surfaces. This is attributed to the stronger Ti–Cl bonds in TiCl4 compared to Ti–N bonds in Ti(DMA)4. Ti(DMA)4 also shows high reactivity to the organics compared to TiCl4. Doublereactions of EG and GL with the TiCl3 species from TiCl4 and TiDMA species from Ti(DMA)4 are also explored to better understand
growth could be achieved.
Keywords: density functional theory (DFT) studies; doublereactions; surface chemistry; titanicone; Introduction
Molecular layer deposition (MLD), a thin film deposition technique, has attracted significant attention in recent years as a suitable approach for the deposition of
°C which decreases to 1.5 Å/cycle at 135 °C. It was assumed that this drop could be related to the desorption of unreacted TiCl4 species at 135 °C. In addition, it was proposed that the reduction in growth rate could also be caused by the desorption of Ti(–O(CH2)2O–)2 species or doublereactions of
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Figure 1:
The plotted ligand loss reactions of TiCl4 on the anatase/rutile TiO2 surfaces. Optimised atomic st...
Beilstein J. Nanotechnol.2014,5, 1104–1136, doi:10.3762/bjnano.5.123
films were not perpendicular to the substrate surface but significantly tilted, suggesting that doublereactions take place during the growth.
The only aromatic polyamide grown by MLD so far was fabricated by using terephthaloyl dichloride and 1,4-diaminobenzene as precursors. In industry, these two
spectroscopy, demonstrating the formation of urea linkages, although some imperfections in the growth, possibly due to doublereactions of ED, were also observed. In a later study by Loscutoff et al. [70] the same precursors were used to fabricate thin films on Si(100), treated with 3
. Heterobifunctionality is believed to reduce the number of doublereactions. During the deposition an epoxy ring-opening reaction takes place: The reaction is strongly dependent on the use of strong Lewis acids such as TMA. The first detailed studies of the growth of TMA+GLY thin films were published by Gong et al. [38
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Figure 1:
Number of articles annually published featuring organic and hybrid inorganic–organic thin films dep...